“MEMS and NEMS processing advances” discussed at IEMN, Lille, France workshop on 8th April 2014

“Nanoscale Processing for NEMS and MEMS” is the topic for the next Oxford Instruments technical workshop, being hosted in conjunction with the Institute of Electronics Micro-electronics and Nanotechnology (IEMN) in Lille, France on 8th April 2014. This one day event aimed at scientists working in research and manufacturing with an interest in MEMS and NEMS, is designed to keep participants abreast of the latest technologies and trends in these hot industry research topics. Participants will be able to listen to a range of talks, including research results from guest speakers, process and application talks and advice, hints and tips from the experts at Oxford Instruments. There will be plenty of time for discussions, and to see process/technical posters.

Talks will include:
·         MEMS – how to make the macro-world smaller
·         Nanoscale etch
·         MEMS research applications and results – IEMN
·         Looking towards the next generation of MEMS devices – a leading research organisation
·         ALD for MEMS – Eindhoven University
·         ALD research and results – Guest speaker

The prestigious Indian Institute of Technology (IIT) in Bombay hosted our most recent Workshop in December 2013, and Prof V. Ramgopal Rao, from IIT commented, “It was a pleasure for me to introduce the plenary sessions at IIT Bombay, and to give a talk on MEMS & Sensors for Healthcare & Homeland Security. Events such as this are an excellent opportunity not just for our researchers at IIT Bombay to learn about latest techniques but also for our colleagues outside this establishment to network and keep up to date with scientific advances”

Dr David Haynes, Sales and Marketing Director at Oxford Instruments said, “We organize an annual series of technical events worldwide, with extremely informative talks from a diverse range of speakers. They are a great means of finding out about new techniques and meeting colleagues facing the same challenges and opportunities in an informal setting.”


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