Spectral reflectometer for film thickness measurement

Verity Instruments, Inc. is pleased to announce the availability of its new SP2100 Spectral Reflectometer designed for film thickness measurement for in-situ and in-line applications.

The SP2100 consists of a high performance spectrometer and Xenon flashlamp with a number of unique features.  These include a two-dimensional, thermoelectrically cooled CCD array that enables the system to simultaneously monitor one to six fiber optic inputs allowing uniformity measurements of up to six points on the same substrate. The integrated Xenon flashlamp provides high intensity, wide spectral range illumination with the ability to separate contaminating background light using an alternating flashlamp mode, along with the ability to provide unblurred measurements in the case of a moving substrate.

The SP2100 is supplied with Verity’s proprietary SpectraView application software that includes various model based and fringe counting thin film measurement algorithms. System integration is possible using RS232 (serial or protocol- based), Ethernet, or Digital I/O communication, and a variety of optical collimators are available for tool integration.



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