Spectral reflectometer for film thickness measurement

Verity Instruments, Inc. is pleased to announce the availability of its new SP2100 Spectral Reflectometer designed for film thickness measurement for in-situ and in-line applications.

The SP2100 consists of a high performance spectrometer and Xenon flashlamp with a number of unique features.  These include a two-dimensional, thermoelectrically cooled CCD array that enables the system to simultaneously monitor one to six fiber optic inputs allowing uniformity measurements of up to six points on the same substrate. The integrated Xenon flashlamp provides high intensity, wide spectral range illumination with the ability to separate contaminating background light using an alternating flashlamp mode, along with the ability to provide unblurred measurements in the case of a moving substrate.

The SP2100 is supplied with Verity’s proprietary SpectraView application software that includes various model based and fringe counting thin film measurement algorithms. System integration is possible using RS232 (serial or protocol- based), Ethernet, or Digital I/O communication, and a variety of optical collimators are available for tool integration.

verity

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <s> <strike> <strong>

LIVE NEWS FEED

NEW PRODUCTS

Versatile high throughput SEM from JEOL
11/04/2015JEOL's new JSM-IT100 is the latest addition to its InTouchScope Series of Scanning Electron Microscopes....
Entegris expands CMP filtration technology solutions and research, analytical and manufacturing capabilities
09/04/2015The Entegris filter platform using NMB media now includes the Planargard bulk, Solaris point...
DCG Systems extends circuit edit capability to the 10nm node with the introduction of OptiFIB Taipan
09/02/2015DCG Systems today announces the release of the OptiFIB Taipan circuit edit solution for the most adv...