Entegris launches ultra clean filter for semiconductor manufacturing

Entegris, Inc. announced the latest addition to its Torrento family of ultra clean liquid filtration solutions used in the semiconductor manufacturing process. The Torrento X Series is the first commercial nondewetting all PTFE filter with 10nm particle retention for advanced wet etch and clean applications.

“As the industry ramps to sub-2X nm manufacturing processes, enhanced cleanliness requirements have become a necessity to reduce particle defectivity and minimize metal contaminants that impact wafer yields,” said Todd Edlund, senior vice president and general manager of Entegris’ Critical Materials Handling Business. “Our new Torrento filter can enable integrated device manufactures to efficiently scale-up and produce more advanced devices.”

Torrento X series filters facilitate “drop-in replacement” of new or existing filters, enabling greater installation flexibility and reducing overall operational costs. The field-proven high-flux membrane filter comes standard with ultra-low metallic cleanliness technology (UCM) to minimize the most challenging contaminants in advanced semiconductor fabs. Entegris also offers an Extreme-Ultra Clean Membrane (X-UCM) option with a higher level of cleanliness compared to any prior generation of PTFE filters with faster start up times and superior retention ratings.

The Torrento X series with 10nm retention, as well as other technology leading contamination control and substrate handling solutions will be featured at the Company’s hospitality suite at the W Hotel in San Francisco, Ca from July 8 through July 10, 2014, which is concurrent with SEMICON West held at the Moscone Center.

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <s> <strike> <strong>

LIVE NEWS FEED

NEW PRODUCTS

3D-Micromac launches the second generation of its high-performance microcell OTF laser systems
04/17/2017The high-performance production solution for Laser Contact Opening (LCO) of PERC solar cells achieves a th...
ULVAC launches NA-1500 dry etching system for 600mm advanced packaging systems
03/24/2017ULVAC, Inc. is pleased to announce the NA-1500 dry etching system for 600mm advanced packaging substrates, providing for u...
Astronics Test Systems announces new PXIe test instruments
01/24/2017Astronics Corporation, through its wholly-owned subsidiary Astronics Test Systems, introduced two new test instruments today. ...