Each year at SEMICON West, the largest and most influential microelectronics exposition in North America, the “Best of West” awards are presented by Solid State Technology and SEMI. The award was established to recognize contributors moving the industry forward with their technological developments in the microelectronics supply chain.
The 2014 Best of West Finalists are:
- Microtronic: EAGLEview IV — EAGLEview IV is an automated macro defect wafer inspection system that provides industry leading throughput (3,000+ Wafers Per Day), defect detection accuracy, and wafer classification. EAGLEview IV resolves many of the problems of manual/micro wafer inspection by automating and standardizing wafer inspection. South Hall, Booth 729 (Category: Metrology and Test)
- Nikon Corporation: NSR-S630D Immersion Scanner — The NSR-S630D ArF immersion scanner leverages the well-known Streamlign platform, incorporating further developments in stage, optics, and autofocus technology to deliver unprecedented mix-and-match overlay and focus control with sustained stability to enable the 10/7 nm node. South Hall, Booth 1705 (Category: Wafer Processing Equipment)
- SPTS Technologies: Rapier XE — Rapier XE is a new, 300mm, plasma etch module which can lower costs and increase yields for device manufacturers utilizing TSVs for 3D packaging. Designed for via reveal applications, the new module offers blanket silicon etch rates typically 3-4x faster than competing systems. South Hall, Booth 1317 (Category: Wafer Processing Equipment)
The Best of West Award winner will be announced during SEMICON West (www.semiconwest.org) on Wednesday, July 9, 2014.