Advanced Process Control in Microelectronics Manufacturing: Leveraging Smart Manufacturing and Big Data

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Date: Friday, April 7, 2017 at 1pm ET

Free to attend

Length: Approximately one hour

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The landscape of microelectronics manufacturing is changing rapidly as the amount of data being generated in the factory grows exponentially along with the capabilities for managing and analyzing that data. Additionally the move to smart manufacturing is adding key capabilities such as connectivity up and down the supply chain and simulation mechanisms to support cyber-physical system concepts. In light of these capabilities we are seeing an explosion in opportunities in Advanced Process Control (APC) and its family of solutions; these solutions include model-based process control, Fault Detection and Classification (FDC), and predictive capabilities such as Predictive Maintenance (PdM), Virtual Metrology (VP), yield prediction, and big data and data analytics approaches. This opportunity explosion is associated with key technology trends such as more service-based cooperative solutions, and increased incorporation of processes and equipment knowledge in solution approaches (often termed Computational Process Control or CPC). The APC Conference is the key conference in the microelectronics industry for exploration of APC challenges and solutions (www.apcconference.com). The 29th Annual APC Conference will be held this October 9-12 in Austin Texas, and will provide insight into the aforementioned APC and related advancements, as well as the important role that APC will play in microelectronics smart manufacturing.

Speakers: 

headshot1Dr. James Moyne is the Standards and Technology Specialist for the Applied Global Services group at Applied Materials. He received his Ph.D. degree from the University of Michigan, where he is currently an Associate Research Scientist in the Department of Mechanical Engineering. James has been involved in APC since the early 90’s starting with his founding of MiTeX Solutions, Inc. in 1995, which provided the first 3rd party advanced process control solutions for semiconductor manufacturing. Dr. Moyne has experience in advanced process control, prediction technology (predictive maintenance, virtual metrology, and yield prediction), and big data technology (focusing on analytics, network performance and data quality); he is the author of a number of refereed publications and patents in these areas. James is currently chair of the Factory Integration Technical Working Group of the International Roadmap for Devices and Systems, and is co-chair of this year’s APC Conference.

van eckDr. Bradley Van Eck is Vice President of the Integrated Measurement Association (IMA) and Co-Chair of the Advanced Process Control Conference. He received his Ph.D. degree from Michigan State University. Bradley has chaired or co-chaired the APC Conference since 1998. He was instrumental in establishing APC conferences in Europe and Asia (Taiwan, Japan). Dr. Van Eck was a founding member of the Integrated Measurement Association in 1999.   Bradley has worked in various capacities for SEMATECH and ISMI from 1990 – 2011. These include, AEC/APC Conference Chair, sensor integration for APC, SEMI Standards, e-Manufacturing, and contributions to the ITRS Factory Integration Technical Working Group.

Sponsored by Epicor

Epicor Software Corporation is a global leader delivering inspired business software solutions to the manufacturing, distribution, retail and services industries. With over 40 years of experience serving small, midmarket and larger enterprises, Epicor enterprise resource planning (ERP), production control software (MES), and supply chain management (SCM), enable companies to drive increased efficiency and improve profitability. With a history of innovation, industry expertise and passion for excellence, Epicor provides the single point of accountability that local, regional and global businesses demand. www.epicor.com/electronics

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