Global MEMS manufacturer selects ULVAC Technologies’ plasma ashing system

ULVAC Technologies, Inc. (, a supplier of production systems, instrumentation and vacuum pumps for technology industries, has been selected by a global MEMS inertial sensor manufacturer to deliver an ULVAC ENVIRO-1Xa advanced plasma ashing system for running critical low-temp descum processes and high-temp bulk photoresist strip processes. These steps are crucial for the manufacturing of high-performance accelerometers and gyroscopes used in consumer, automotive, health and fitness, and industrial applications.

The ENVIRO-1Xa is the latest photoresist removal equipment from ULVAC, and offers superior performance at an exceptional price. The system is equipped with a versatile platform that can handle multiple wafer sizes, ranging from 4-inch to 8-inch in diameter. The system is capable of high-speed photoresist removal at more than 10µm/min, but has the process flexibility required for other important operations, such as; high-dose implanted resist removal, descum and surface modification, SU-8 and fluorinated resist removal, and MEMS sacrificial-layer removal.

Wayne Anderson President/CEO of ULVAC Technologies, Inc. states that “The sale of this ENVIRO 1Xa, for descum applications, serves to increase our market penetration in the global MEMS manufacturing marketplace, where we have been very successful with our MEMS product portfolio; which includes plasma etching equipment, sputter deposition equipment and the ENVIRO family of plasma ashing equipment.”


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