Issue



WG CC042 seeks feedback to create liquid particle counting RP


10/01/2007







The Institute of Environmental Science and Technology (IEST) has begun assessing the need for a Recommended Practice (RP) on liquid particle counting (LPC). Working Group CC042, formed last November, has been assigned to work on RP-CC042.1, “Sizing and counting of submicrometer liquid-borne particles using optical discrete-particle counters,” with a focus on applications in the semiconductor, flat-panel display, and data storage industries. The Working Group intends to complete a votable version of the RP by the end of next year.

The RP will cover the following topics:

  • An overview of light scattering technology
  • Applications of LPC instruments-batch and inline types
  • Cumulative vs. differential counts
  • Coincidence level
  • Lower particle size detection limit
  • Bubble issues
  • Refractive index effects
  • Calibration verification
  • Particle extraction methods
  • Statistics
  • Instrument noise
  • Flow rate
  • Sensor preventive maintenance
  • Counter correlation

The Working Group has broad participation from LPC manufacturers, end users, and consultants in the microelectronics industry. The members would like to gather more feedback from end users to make the document as effective as possible. If you are interested in contributing to this RP, please contact Huaping Wang, chair of WG CC042, at huaping_wang@entegris.com, or (952) 556-4532.

The Working Group’s next meeting will take place at IEST’s Fall Meeting on November 14 in Chicago.