SEMICON WEST 2007
JULY 16-20, 2007 MOSCONE CENTER, SAN FRANCISCO, CA
Tuesday, July 17-Wednesday, July 18 10:00 a.m.-6:00 p.m.
Thursday, July 19 10:00 a.m.-4:00 p.m.
Conference program runs from Monday, July 16, through Friday, July 20
SEMI, the global industry association serving the semiconductor manufacturing supply chain, is hosting its 37th annual SEMICON West Conference and Exhibition from July 16-20. Attendees will have the chance to learn about the latest developments in nanoelectronics, MEMS, test and packaging/assembly, wafer processing, and more. For a complete conference schedule, visit www.semi.org.
The President’s Reception
Monday, July 16, 6:00-7:00 p.m.
At the President’s Reception, connect with global industry leaders and experts and cultivate new contacts.
“Distributed Innovation: Leveraging Collaboration for Competitive Advantage in Semiconductor Manufacturing”
Tuesday, July 17, 9:00-10:00 a.m.
AMD’s senior vice president of technology development, manufacturing and supply chain, Douglas Grose, will address the need for collaborative innovation in the semiconductor industry as a result of rapidly rising costs, outlining the competitive advantages and different models for successful collaboration.
ITRS 2007 Public Conference
Wednesday, July 18, 8:00 a.m.-5:45 p.m. (Networking Social 5:45-7:00 p.m.)
The International Technology Roadmap for Semiconductors (ITRS) celebrates its tenth year as the first international roadmap for any industry with an opportunity for public participation during the ITRS working group presentations of draft material for the latest revision.
SEMICON West Standards Meetings
Monday, July 16-Friday, July 20 (generally between 8:00 a.m.-5:30 p.m.)
Topics for standards issues abound, from electrostatic discharge prevention to equipment productivity measurement to factory automation standards.
More than 1,300 leading companies and suppliers connected to the semiconductor manufacturing industry will display their innovations at SEMICON West 2007. Here are a few that will be of interest to the contamination control community.
Anticon Products by Milliken
Anticon® Products by Milliken introduces its newest wipers with Particle Attraction Technology (P.A.T.). Anticon wipers with P.A.T. (top) capture up to 35 times more particles than traditional wipers (bottom) and retain 95 percent of particles captured, reducing the risk of recontamination. The wipers arrive cleaner: A vertical manufacturing model, in the industry’s only ISO Class 1 at 0.1 micron facility for wiper production, ensures rigorous standards for cleanliness are met across all manufacturing steps. The wipers are available in a variety of fabric bases, sizes, and weights, used with solvents or for dry wiping.
Engineered to meet the advanced wet process requirements of the semiconductor industry, the Dymatrix specialty valves line includes pinch valves, diaphragm valves, needle valves, and pressure regulators that are suited for CMP slurry, DI water, and chemical process applications. The durable pinch valve eliminates particle generation in CMP slurry applications. The diaphragm valves are engineered for high cycle life and compact design. The needle valve utilizes a dual stem for true linear flow control and integrated diaphragm for excellent purity. The pressure regulators are designed to provide accurate and highly stable control of pressure fluctuations for flow control applications.
BOC Edwards is a leading provider of support equipment solutions for the semiconductor, solar, and flat-panel display industries. The company’s technical experts work closely with leading process system manufacturers to develop innovative products required to meet critical performance challenges. The global service network ensures local support around the world. BOC Edwards will be showcasing its latest products: dry vacuum and turbo pumps, exhaust gas management, and component cleaning parts.
DuPont Controlled Environments
DuPont is dedicated to the science of protection. The goal of DuPont Controlled Environments is to provide high-performance solutions for today’s demanding controlled environments. Combining scientific innovation and material, garment and manufacturing expertise, DuPont Controlled Environments products are specially engineered to enhance productivity in today’s demanding biotechnology, pharmaceutical, medical device manufacturing, and electronics cleanroom environments. The company offers a wide range of protective garments and products, including DuPont Tyvek® IsoClean garments for premium protection, DuPont Suprel® LS for a balance of comfort and protection, and a range of accessories such as DuPont Gripper shoe and boot covers with superior coefficient of friction properties. In addition, DuPont Controlled Environments specialists are industry experts who can help with site assessment and a variety of contamination control issues to help ensure each critical environment is as efficient as possible.
Booths 1020 and 1114
Entegris provides high-performance products and solutions that purify, protect, and transport the critical materials that are essential to the world’s semiconductor manufacturers, OEMs, and materials suppliers. Using its market and technological leadership in materials science and micro and molecular contamination control, Entegris helps its customers enhance their yields and improve their productivity along their technology roadmaps. Featured products at SEMICON West will include Clarilite certified reticle haze prevention system (booth demo); IntelliGen® mini two-stage-technology dispense system (booth demo); LiquidLens UPW purification system; QuickChange® ATE 30 nm non-dewetting Teflon® filter (shown); PVA brushes; front-opening shipping box (FOSB); Spectra front-opening unified pod (FOUP); 300 mm multiple film frame shipper; and Ultrapak® edge guard wafer shipper.
Kimberly-Clark Professional offers a dispenser for pre-saturated alcohol wipers that provides convenient, one-handed dispensing with no need to hold a package or re-seal a closing flap. The new KIMTECH PURE* Dispenser makes cleanroom wiping easier than ever before. A self-closing, self-sealing lid helps prevent dry-out of wipers, eliminating waste. An innovative extractor arm automatically lifts each wiper for easy pickup without damaging the wipers. The dispenser also features a durable design that does not generate particles and makes refilling easy.
Kinetic Systems, Inc.
The 9600 Series Class 1 cleanroom-compatible vibration isolation workstation from Kinetic Systems, Inc. is designed specifically for cleanrooms and uses proven performance characteristics from KSI’s standard line. Electropolished stainless-steel welded tubular braces, enclosed isolation modules, stainless-steel valves, vented exhaust, low natural frequencies, and high isolation efficiencies provide an ideal Class 1 cleanroom match.
Lighthouse Worldwide Solutions
Using patent-pending technology, Lighthouse Worldwide Solutions has created the smallest sequencing particle counting manifold system in the industry. When connected to Lighthouse particle counters, the 1 CFM Mini Manifold is the best-in-class solution for tool monitoring and qualification, minienvironment monitoring, and even portable, cart-based monitoring systems. The 1 CFM Mini Manifold consists of a manifold sequencing system with a built-in controller and a miniblower for purge flow. The controller communicates with the particle counter and can interface to a computer system or process tool.
MKS Instruments, Inc. will exhibit the CONTINUUM Universal Industrial Network Gateway with cLogic and the MacroNode I/O Controller with EtherCAT interface. These new solutions offer precise process control through faster network performance and improved web browser diagnostics. The MKS CONTINUUM quickly connects any serial device to Fieldbus and industrial Ethernet protocols, and includes cLogic technology that enables users to implement custom data translation. The MacroNode I/O now supports EtherCAT, an open real-time network, as well as Modbus/TCP, Ethernet/IP and DeviceNet.
RASIRC, the Steam Purification Company, offers products that generate high flow, ultra-pure water vapor that is contaminant free and produced safely and economically using readily available DI water. Water vapor control ranges from 10 sccm to 100 slm. The RASIRC technology includes the RASIRC Steamer, the first steam purification system brought into the semiconductor market. The RainMaker Humidifier features a non-porous membrane for controlled humidification of clean air or other process gases while preventing contact between the carrier gas and water. This “bubbleless bubbler” technology is stable, accurate, and repeatable from 10 sccm to 10 slm.
Scott Specialty Gases
The Electronic Materials Group of Scott Specialty Gases is a world leader in the development and supply of high-performance specialty gases to semiconductor, TFT-LCD, optical, MEMS, and related industries. Products include Omega Class dopants, enhanced HBr, CO2, NO, and many other gases that eliminate raw material waste and process retuning, and speed product time-to-market. Scott maintains strategically located ISO 9001:2000 certified manufacturing facilities and distributes products throughout North America, Europe, and Asia.
Technical Manufacturing Corp.
Technical Manufacturing Corporation (TMC) designs and manufactures precision vibration isolation systems for sensitive research and manufacturing processes worldwide. Its STACIS® 2100 is a six-degrees-of- freedom active cancellation system employing geophones to sense ambient building floor vibration. Piezoelectric actuators drive the payload with equal and opposite force to cancel vibration from 0.6 to 250 Hz. STACIS allows precision metrology and lithography tools to be located in noisy environments and still meet tool manufacturers’ floor vibration criteria. The Electro-Damp® II active pneumatic vibration-damping system is ideal for tools that incorporate X-Y stages. The Gimbal Piston air isolator provides extremely effective vibration isolation, and the force motors provide aggressive damping of X-Y stage-induced motion, resulting in minimum payload motions, rapid settling time, and higher tool throughput.
TREK provides instruments and expertise for ESD management, ionizer evaluation, and materials research, including charge-plate monitors, electrostatic voltmeters, surface resistivity meters, electrostatic sensors/monitors, and charge-to-mass test systems. The company also offers ESD seminars and surveys. TREK’s new Model 900 ESD event detector is a diagnostic tool for ESD-sensitive environments, specifically for charge device model (CDM) events. The new Model 520A hand-held electrostatic voltmeter accurately measures surface voltage over a wide range of probe-to-surface spacings. It enables inspection of small spots for static charge accumulation and also measures charge accumulation in difficult-to-reach locations. TREK will hold an Exhibitor Showcase on July 18 at 10:30 a.m., Room 113.