Steamer for oxidation processes
The RASIRC Steamer 501 is a safe, compact, and economical system that can deliver a steam flow rate of more than 50 slm, which exceeds the flow capacity of other technologies. The new steamer addresses semiconductor, flat-panel, solar, and optical device applications that utilize oxide film production, wafer cleaning, and other oxidation processes. It consists of two components: a steam generator that converts DI water into high-flow, ultra-high purity (UHP) water vapor, and a purifier assembly that purifies clean steam to UHP steam by selective removal of dissolved gases, metals, and particulates. Unlike torches, which generate steam through combustion of hydrogen and oxygen, the steamer does not use hydrogen or oxygen, increasing safety. The need for compressed air or chilled water for cooling the torch is eliminated, which significantly cuts energy costs. Storage tanks for hydrogen and oxygen are no longer needed. Recent tests in a 450-mm furnace on 300-mm wafers show that the RASIRC Steamer produced uniformity equal to or exceeding films grown by a torch.
San Diego, CA
The new, enhanced Finn-Aqua GMP Bio Pharma sterilizers include the patented SAMX (steam-air mix) cycle, which allows the processing of liquid-filled flexible containers such as IV bags, blister packs, syringes and plastic vials, and circulates the steam-air mix without moving parts that can wear out. Other enhancements include modularized and standardized piping for similar design and easy maintenance regardless of the size and configuration of the system; both single and double-door configurations; quieter two-stage vacuum pump that reduces water consumption; choice of PLC platforms; and a fully jacketed chamber that meets cGMP requirements for uniform temperature distribution. The Finn-Aqua GMP Bio Pharma units are supported by the company’s service force worldwide. A specialized team of field engineers can respond quickly to assist with complex equipment issues.
Ductless fume hoods
The new Purair 5 ductless fume hoods exceed OSHA, ANSI, and all relevant international standards. The ductless design eliminates installation costs and allows the unit to be positioned over a sink or benchtop apparatus. There are three models available with a choice of 24-, 36-, or 48-in. widths. The units operate at low noise levels and, because they recirculate, they do not exhaust expensive conditioned and/or heated air into the atmosphere. A face velocity of 100 FPM ensures containment of fumes and particulates for operator protection. An alarm alerts the operator when the airflow falls to an unacceptable level. The unit can be placed on any bench top, and an optional polypropylene spillage tray can be provided when required. All mechanisms in the head section are on the clean side of the filter, with the switches and electrical components being isolated from any contamination. The main filter can be selected from 14 different types of carbon, which include specialty media for vapors of organics, solvents, acids, mercury, and formaldehyde. HEPA filters for particulate filtration are also available.
Air Science USA
Fort Myers, FL
Continous cleanroom analyzer
The Tiger-i™ line of analyzers provides cleanroom ambient air monitoring for gas-phase airborne molecular contaminants (AMCs) that compromise manufacturing process quality and yield. The analyzer employs patented continuous-wave cavity ring-down spectroscopy (CW-CRDS). The Tiger-i line measures into parts-per-trillion levels of trace hydrofluoride (HF) and hydrochloride (HCl) gases. The built-in reference cell and automated tune function provide 99.9 percent uptime without calibration, consumables, or maintenance. By enabling manufacturers to quickly and reliably correlate events such as tool issues, chemical spills, material outgassing, and loadlock openings, process yields can be optimized. The Tiger-i cleanroom analyzer is currently available in two platforms: the Tiger-i 1000 and the Tiger-i 2000. The Tiger-i 1000 HF and HCl analyzers employ a split architecture that allows users to place sensor modules up to 50 m away from the central analyzer and is based on the LaserTrace™ line of analyzers. The Tiger-i 2000 HF and HCl analyzers provide a compact, integrated architecture for enhanced analysis with a smaller footprint and are based on the HALO™ line of mini-CRDS analyzers.
Tiger Optics, LLC
Protection for valves, assemblies in harsh environments
Customized valve boxes provide protection for all Asahi/America valves and valve assemblies. The fully enclosed boxes are available in polypropylene, HDPE, PVDF, ECTFE (Halar), PVC, or CPVC. Valves are totally encased in the thermoplastic valve box. Valve actuators can also be mounted inside or outside of the box based on application requirements. The valve boxes can be used with Asahi’s single-wall and double-containment piping. They can be constructed with flanged connections for easy installation into existing installs or custom fitted at the factory. By manufacturing the box with the same material as the piping system, the welded joint can be applied directly to the box with no external hardware, creating a more secure enclosure. Clear covers provide visual leak detection and valve position status. When used with leak detection cable, the box acts as a pull box for ease of wire pulls. The leak detection cable can also be installed in box bottom for leak detection purposes.
Dual coverall for extra protection in vulnerable areas
DuPont’s Tyvek® Dual coverall features a front and sleeves made entirely from Tyvek® fabric and a back panel made of DuPont’s advanced composite technology (ACT) fabric. In some industries, limited-use coveralls are worn to protect workers from hazards such as water-based liquid splashes, particles, and general dirt. Traditionally, garments offer the same level of protection overall, but in some cases the risk of exposure may be largely frontal, whereas other areas demand high abrasion resistance and robustness. The Tyvek® material offers excellent barrier protection against fine particles and fibers, repels water-based liquids and vapors, and offers breathability; the ultra-high air and water vapor permeability and tactile touch of the patented ACT fabric provide increased levels of comfort. The ergonomically designed ACT panel stretches from the back of the head down to the back of the ankles, reflecting the position of the body’s sweat points. The garment features externally stitched seams and a zipper and zip flaps made of Tyvek® to give increased protection and durability in areas of high stress (such as knees, elbows, zip area, and crotch); elasticized wrist cuffs, ankle, and facial openings form tight seals to help to reduce the risk of penetration from the outside to the inside of the garment.
Total exhaust BSC
The Thermo Scientific 1300 Series B2 total exhaust biological safety cabinet (BSC) uses advanced DC motor technology, increasing user safety as well as protecting samples from contaminants. The BSC exceeds the highest quality and safety standard recommendations from NSF/ANSI 49 for use of volatile toxic chemical and radionuclides in cell culture applications and meets the current recommendations of the NIOSH Alert for Hazardous Drug Preparation. Available in 4- and 6-ft-wide models, the BSC utilizes HEPA filters to maintain a clean air inflow and downflow across the entire sample area. Hard-ducted to the external environment, the 1300 Series B2 prevents recirculation of any air or gas into the sample chamber. Automatic adjustment of the air downflow during HEPA filter loading improves product safety and increases filter life. The 1300 Series B2 cabinet provides a timed UV light option, which not only reduces the risk of contamination but also prevents frequent bulb replacement and reduces maintenance costs. Cleaning is simplified by the single-piece stainless-steel work tray, which minimizes loss of pipette tips or spills into the drain pan.
Thermo Fisher Scientific Inc.
Liquid-handling QA system
ARTEL’s Pipette Quality Management System is intended to help labs easily transition to a robust, in-house pipette calibration process for greater control over data quality. As part of the Pipette Quality Management System, ARTEL will install and validate the ARTEL PCS® pipette calibration system to seamlessly and rapidly integrate it into existing laboratory operations. The company will also train laboratory staff on using the PCS and its pipette quality-management software to ensure optimal execution of liquid-handling QA programs. The PCS is a rapid, user-friendly instrument that automatically measures and documents the accuracy and precision of volumes dispensed from single-channel pipettes. It can be used on the bench and calibrates pipettes in minutes.
Automation system for semiconductor facilities
Agile Automation is a new approach to automated material handling in semiconductor fabs. It increases fab productivity through modular enhancements to the existing AMHS system, enabling the ability to load and unload several tools in parallel while substantially reducing dependency on OHT vehicles. This results in shorter and more predictable FOUP delivery times and improvements in throughput and tool utilization. New technologies incorporated include the DLT Lifting Loadport™ for OHT-independent tool loading; the Satellite Stocker™; the Velocity™ HTC conveyor; and VAO software, which allows real-time visualization of fab processes and material flow. Fabs can achieve additional savings through reduced floor space requirements, potentially fewer tools, and lower power consumption.
Asyst Technologies, Inc.
Lightweight, reusable, disposable gloves
PolyConversions Inc. now offers VR™ gloves as part of its proprietary line of protective apparel. The gloves are odorless and free of vinyl and latex. VR gloves feature an elastic elbow-length cuff impervious to punctures providing cold-crack resistant protection. The gloves are lightweight, reusable, and disposable; the material contains no toxic substances or plasticizers. VR gloves can be safely recycled, land-filled, or incinerated without harming the environment. They have been clinically tested to offer resistance to chemicals such as nitric, sulfuric, hydrochloric, and hydrofluoric acids. Independent tests have demonstrated that the gloves meet Class 100 cleanroom specifications. VR replaces conventional protective wear made of vinyl and other traditional materials intended to safeguard cleanroom and non-cleanroom employees from potential chemical or bio-hazard contamination. The VR line of protective wear also includes aprons, sleeves, gowns, boot covers, shoe covers, rain wear, overalls, and jackets.
Overseal capping machine
The VRK overseal capping machines are designed for continuous operation. They feature filling volumes ranging from 2 to 500 mL and an output of up to 600 units/min. A combination of laminar flow (LF) design and the gentle capping principle together with an extraction device close to the capping area meet the requirements of the latest EU guidelines of Annex 1 to produce sterile medical products. The separate sealing of substructure and capping unit facilitates isolator integration. The modular machine concept allows for customized configuration of container entry and discharge. An optical stopper recognition unit identifies misplaced or missing stoppers and sorts the containers prior to entering the capping assembly. The feeding wheel ensures precise orientation of containers within the capping unit. To achieve consistent capping, containers are placed in a bracket by applying a preset pressure and continuously rotated. The overseal capping is applied to the rotating containers using spring-loaded rollers. All recorded process parameters are retained and are retrievable for validation purposes.
Bosch Packaging Technology