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Solid State Technology
Risk is reshaping the chip industry
What does the sub-prime mortgage meltdown have to do with chipmaking? In today’s global, interconnected economy, probably much more than we may think.
The state of standards
A survey of MEMS industry players reveals points of agreement and divergence on the ever-controversial topic of production standards.
Yield at any cost
Photomask costs are a painfully visible issue in today’s competitive semiconductor market.
High-index materials research key to extending immersion lithography
The adoption of water-based immersion lithography into 45nm half-pitch processes is in full swing, but if optical lithography is to continue to dominate leading-edge semiconductors, some advances are needed.
2007 International Technology Roadmap: MOSFET scaling challenges
The 2007 International Technology Roadmap for Semiconductors (ITRS) makes projections covering the next 15 years, through 2022.
Metrology For Lithograph
Influence of immersion lithography on wafer edge defectivity
In semiconductor manufacturing, the control of defects at the edge of the wafer is a key factor to keep the number of yielding die on a wafer as high as possible.
Membrane compatibility for nanofiltration applications in DUV lithography
Typical photochemical solutions contain a variety of additives, often in trace amounts.
Improve productivity at nm nodes with faster physical verification
The increasing number and complexity of design rules result in a significant increase in design rule check (DRC) run times, many more DRC violations, and an increase in the intricacy of these violations that makes them more difficult to analyze and fix.
Crystalline silicon solar cell manufacturing requires vacuum-based solutions
Crystalline silicon solar cell manufacturing requires vacuum-based processing tools for many critical steps, from mono- to polycrystalline silicon growth to thin-film depositions on silicon wafers.
Product Focus Metrology
Product Focus: Metrology / Inspection