Table of Contents

Solid State Technology

Year 2007
Issue 8



Skin in the game

The semiconductor industry continues to promise greater rewards, with compound annual growth rates forecasted to be in the high single digits for many years to come.

World News


Tech News

Technology news

Compound Semiconductors

Growing market for LEDs fuels need for advanced abatement systems

The exploding demand for LEDs is driven by their dramatic advantages relative to other lighting technologies.



Industry Forum

Will RDRs lead to a resurgence of in-house design tools?

In many ways, it was a lot easier in the 1960s and 1970s, before disaggregation. Integrated device manufacturers (IDMs) had ownership of all the technologies that were needed to design and manufacture integrated circuits: device and process R&D, semiconductor equipment, and IC design tools.


Cover Article

Properties of octadecaborane-based ULE boron implants

The materials properties of junctions formed by ULE implants of B18H22+ provide an opportunity to significantly increase productivity for all low-energy p-type implants without the use of deceleration and the associated risk of energy contamination.

Thermal Processing

A variable batch size DCS nitride process using low-temperature LPCVD

As thermal budgets for nitride deposition have decreased to meet sub-90nm process requirements, silicon nitride films have been widely used in LPCVD or plasma enhanced chemical vapor deposition (PECVD) to deposit spacer, etch stop layer, oxynitride-oxide stacks, and oxide masks for front-end-of-line applications [1, 2].


Biomedical applications using magnetic nanoparticles

Magnetic nanoparticles (MNPs) can be used in a wide variety of biomedical applications [1, 2], ranging from contrast agents for magnetic resonance imaging to the deterioration of cancer cells via hyperthermia treatment.

Atomic Layer Deposition

Quantifying ALD technologies for high aspect ratio structures

Chemical vapor deposition (CVD) has become an essential technique for thin film deposition in integrated circuits (IC).


Resilience, industry growth put FPD plants on fast track

Faster, bigger, better, thriftier: these are the drivers that have relentlessly shaped Taiwan’s reputation in manufacturing over the years.