Table of Contents

Solid State Technology

Year 2016
Issue 2



Impact of triboelectric charging from DI water on transistor gate damage

Optimized settings for DI water pressure at CMP and careful analysis of interconnect layout are used to improve quality on a complex analog design.


Chipmakers seek solution to neon gas supply shortage

Finding a short term solution to the neon gas shortage problem will be challenging.


How finFETs ended the service contract of silicide process

A look into how the silicide process has evolved over the years, trying to cope with the progress in scaling technology and why it could no longer be of service to finFET devices.

Gas Abatement

Managing hazardous process exhausts in high volume manufacturing

Integrated sub-fab systems allow HVM fab operators to safely and efficiently implement new processes containing hazardous process chemicals.

Mass Flow Controllers

A new class of MFCs with embedded flow diagnostics

Recent trends in multi-sensor measurements within a mass flow controller are reviewed, with a focus on controller self-diagnostics.

Contamination Control

Trace metal contamination: Choosing elastomer materials for critical operations

An exploration of where trace metals come from, the impact they have on the industry and what can be done to reduce the risks.


Fairchild rejects proposal from China Resources, Hua Capital

Fairchild Semiconductor\'s board of directors has determined that the unsolicited proposal received from China Resources Microelectronics Ltd and Hua Capital Management Co., Ltd. does not constitute a “Superior Proposal” as defined in the company’s agreement with ON Semiconductor.

Silicon chip with integrated laser: Light from a nanowire

Physicists at the Technical University of Munich (TUM) have developed a nanolaser, a thousand times thinner than a human hair. Thanks to an ingenious process, the nanowire lasers grow right on a silicon chip, making it possible to produce high-performance photonic components cost-effectively. This will pave the way for fast and efficient data processing with light in the future.

Neon shortage coming

Semiconductor lithographic use of Neon is increasing more rapidly than expected for several reasons including the delay of EUVL while demand for finer line width patterning is increasing.

SUNY Poly, GLOBAL FOUNDRIES announce new $500M R&D program

SUNY Polytechnic Institute (SUNY Poly) and GLOBALFOUNDRIES today announced the establishment of a new Advanced Patterning and Productivity Center (APPC), which will be located at the Colleges of Nanoscale Science and Engineering (CNSE) in Albany, N.Y.



China's semiconductor strategy

China has become the largest and the fastest growing market in the world. 40% of the worldwide semiconductor shipments go to China and that’s expected to increase to almost 42% in 2019.