Managing particle flows in process exhaust for safety and profitability

10/28/2016  Solid particles in the abatement exhaust must be properly managed, and in some cases, substantially reduced from the gas stream before it is released into the environment.

Busch wins annual NXP Semiconductors Best Supplier Award

05/25/2016  NXP Semiconductors N.V. announced Busch Semiconductor Vacuum Group LLC as the Best Supplier for Front-end equipment (semiconductor equipment) at NXP’s first Supplier Day Awards ceremony in Austin, Texas.

Managing hazardous process exhausts in high volume manufacturing

03/30/2016  Integrated sub-fab systems allow HVM fab operators to safely and efficiently implement new processes containing hazardous process chemicals.