Fri, 12 Dec 2015
In plasma-etch, chemical vapor deposition and many other processes, accurate metering of gas flow into the process chamber is critical.
Wed, 2 Feb 2015
MKS Instruments, Inc., a global provider of technologies that enable advanced processes and improve productivity, has introduced the I-250, I-500 and I-1000 Mass Flow Controllers.
Mon, 3 Mar 2013
Brooks Instrument, a provider of advanced flow, pressure, vacuum and level solutions, has expanded its GF 40/80 Series portfolio of thermal mass flow controllers. Broader capabilities, including increased flow rates up to 50 slpm and a “normally open” valve for non-hazardous gas applications, are ideal upgrades for users of Aera (Hitachi), Celerity, Tylan, Mykrolis, Millipore and Unit mass flow controllers, as well as other competitive devices.
Thu, 3 Mar 2016
Recent trends in multi-sensor measurements within a mass flow controller are reviewed, with a focus on controller self-diagnostics.
Thu, 4 Apr 2016
Celebrating its 70th anniversary, Brooks Instrument will be exhibiting at SEMICON West 2016 with new mass flow controllers (MFC) equipped with the high-speed EtherCAT interface, along with a broad range of other mass flow meters, controllers, vaporizers and capacitance manometers for semiconductor manufacturing.