mass-flow-controllers

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Mass Flow Controllers

Fri, 12 Dec 2015
In plasma-etch, chemical vapor deposition and many other processes, accurate metering of gas flow into the process chamber is critical.

MKS introduces the I-Series family of high flow mass flow controllers

Wed, 2 Feb 2015
MKS Instruments, Inc., a global provider of technologies that enable advanced processes and improve productivity, has introduced the I-250, I-500 and I-1000 Mass Flow Controllers.

Brooks Instrument launches upgrades to thermal mass flow controllers

Mon, 3 Mar 2013

Brooks Instrument, a provider of advanced flow, pressure, vacuum and level solutions, has expanded its GF 40/80 Series portfolio of thermal mass flow controllers. Broader capabilities, including increased flow rates up to 50 slpm and a “normally open” valve for non-hazardous gas applications, are ideal upgrades for users of Aera (Hitachi), Celerity, Tylan, Mykrolis, Millipore and Unit mass flow controllers, as well as other competitive devices.


A new class of MFCs with embedded flow diagnostics

Thu, 3 Mar 2016
Recent trends in multi-sensor measurements within a mass flow controller are reviewed, with a focus on controller self-diagnostics.

SEMICON West 2016: New high-speed EtherCAT mass flow controllers from Brooks Instrument

Thu, 4 Apr 2016
Celebrating its 70th anniversary, Brooks Instrument will be exhibiting at SEMICON West 2016 with new mass flow controllers (MFC) equipped with the high-speed EtherCAT interface, along with a broad range of other mass flow meters, controllers, vaporizers and capacitance manometers for semiconductor manufacturing.