turbomolecular-pumps

Topic Index

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Vacuum Pumps

Fri, 12 Dec 2015
Many semiconductor manufacturing process steps require a mid- to high-level of vacuum in the process chamber to operate effectively.

Improving the reliability of dry vacuum pumps in high-k ALD processes

Tue, 2 Feb 2015
Design features that contributed most to the improved performance include increased rotational speed, integrated rotor sleeves, and increased purge injection temperature.

Save costs by conserving energy in the sub-fab

Wed, 7 Jul 2015
Opportunities for cost savings abound in the “sub-fab” of semiconductor operations where the vacuum pumps and gas abatement systems reside.

Busch Vacuum Pumps and Systems joins F450C Consortium

Tue, 3 Mar 2014
The Facilities 450mm Consortium (F450C), a partnership of nanoelectronics facility companies guiding the effort to design and build the next-generation 450mm computer chip fabrication facilities, today announced Busch Vacuum Pumps and Systems as the eleventh member company to join the consortium.

ULVAC launches dry vacuum pump accessory ECO-SHOCK ES4A

Fri, 9 Sep 2015
ULVAC, Inc. announced that it has recently developed and started selling the ECO-SHOCK ES4A, a power saving accessory for dry vacuum pumps that can reduce power consumption.