vacuum-pumps

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Vacuum Pumps

Fri, 12 Dec 2015
Many semiconductor manufacturing process steps require a mid- to high-level of vacuum in the process chamber to operate effectively.

Cryogenic Vacuum Pumps

Wed, 12 Dec 2015
The cryopump provides fast, clean pumping of all gases in the mid- to high-vacuum range.

Improving the reliability of dry vacuum pumps in high-k ALD processes

Tue, 2 Feb 2015
Design features that contributed most to the improved performance include increased rotational speed, integrated rotor sleeves, and increased purge injection temperature.

Save costs by conserving energy in the sub-fab

Wed, 7 Jul 2015
Opportunities for cost savings abound in the “sub-fab” of semiconductor operations where the vacuum pumps and gas abatement systems reside.

Busch Vacuum Pumps and Systems joins F450C Consortium

Tue, 3 Mar 2014
The Facilities 450mm Consortium (F450C), a partnership of nanoelectronics facility companies guiding the effort to design and build the next-generation 450mm computer chip fabrication facilities, today announced Busch Vacuum Pumps and Systems as the eleventh member company to join the consortium.

ULVAC launches dry vacuum pump accessory ECO-SHOCK ES4A

Fri, 9 Sep 2015
ULVAC, Inc. announced that it has recently developed and started selling the ECO-SHOCK ES4A, a power saving accessory for dry vacuum pumps that can reduce power consumption.

Pfeiffer Vacuum presents innovative vacuum solutions at the trade fairs Semicon Korea and Semicon China

Mon, 1 Jan 2016
Pfeiffer Vacuum, a global supplier of vacuum technology, will be exhibiting at the SEMICON Korea Trade Fair in Seoul from January 27 to 29 and Semicon China in Shanghai from March 15 to 17.

Edwards launches new vacuum pumps at SEMICON China 2016

Tue, 3 Mar 2016
Edwards announced the availability of two new vacuum pump product families at SEMICON China: the iXM Series for semiconductor etch and chemical vapor deposition (CVD) applications, and the iXL900R for fast pump down of large flat panel display (FPD) loadlock chambers.

Managing hazardous process exhausts in high volume manufacturing

Wed, 3 Mar 2016
Integrated sub-fab systems allow HVM fab operators to safely and efficiently implement new processes containing hazardous process chemicals.

Managing particle flows in process exhaust for safety and profitability

Fri, 10 Oct 2016
Solid particles in the abatement exhaust must be properly managed, and in some cases, substantially reduced from the gas stream before it is released into the environment.