Charged-plate monitor system

Charged-plate monitor system

TREK, Inc. has developed the Model 156 charged-plate Monitor System, specifically designed to test the effectiveness of the work surface and laminar flow hood air ionization systems used in ESD-control programs. The Model 156 uses a simple ion-collecting-plate design that utilizes a two-conductor miniature cable. This places the ion-collecting plate directly into manufacturing processes, unlike systems that have fixed or detachable air ion collecting plates.

A single-connection technique allows plate geometry to be varied over a large range of sizes, shapes, and thicknesses to accommodate virtually any monitoring application, such as those in a semiconductor or LCD manufacturing line. An ultra high impedance, high-voltage follower monitors collecting-plate voltage. This provides very high accuracy, small-signal band width exceeding 1 kHz, and an impedance-loading of the air ion-collecting plate greater than 1017 ohms, while allowing the plate to be charged and monitored through the same plate connection.

TREK, Inc.

Medina, NY

(800) FOR-TREK or (716) 798-3140


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *


KLA-Tencor announces new defect inspection systems
07/12/2018KLA-Tencor Corporation announced two new defect inspection products at SEMICON West this week, addressing two key challenges in tool and process monit...
3D-Micromac unveils laser-based high-volume sample preparation solution for semiconductor failure analysis
07/09/2018microPREP 2.0 provides order of magnitude time and cost savings compared to traditional sample...
Leak check semiconductor process chambers quickly and reliably
02/08/2018INFICON,a manufacturer of leak test equipment, introduced the UL3000 Fab leak detector for semiconductor manufacturing maintenance teams t...