Material Handling System
Automating the transfer of materials among input/output ports, process tools and storage units in a cleanroom environment can be achieved with PRI Automation`s new 360-Degree Machine-Loading Robot (360 MLR). According to PRI, the 360 MLR is the first product of its kind to function in a Class 1 cleanroom. The robot provides an extended range of motion for handling semiconductor wafers larger than 200 millimeters, as well as other types of materials, including flat panel displays. The 360 MLR integrates PRI`s standard MLR robot arm with a new Z-axis assembly to interface with cassettes or pods and handle 600 ¥ 720 mm flat panel displays. The 360 MLR can be track-mounted to service multiple tools and I/O ports.
PRI Automation, Inc. Billerica, MA (508) 663-8555