U.S. court upholds patent infringement against Steag

U.S. court upholds patent infringement against Steag

West Chester, PA

The U.S. District Court for Delaware has upheld a jury finding that Steag MicroTech willfully infringed a U.S. patent owned by CFM Technologies, Inc. and licensed to CFM. The judgment was brought against Steag for selling Marangoni dryers. The court permanently enjoined and restrained Steag from importing, making, using, offering for sale or selling any infringing product. It also upheld the jury`s $3.1 million award in damages. No appeals are expected to be filed. CFM Technologies manufacturers advanced cleaning equipment for the semiconductor and flat panel display industries. — TGW

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