Mattson to divest single-wafer RT-CVD business unit

February 21, 2001–Fremont, California–Mattson Technology, Inc., a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that the company plans to divest its single-wafer RT-CVD business unit, previously known as STEAG CVD Systems.

The business unit, which was acquired as part of the merger with STEAG, included lamp-based RT-CVD tools that were not a fit with Mattson’s strategic roadmap for thermal and CVD products. Mattson’s decision to sell the business unit is a result of the company’s strategy to focus on its core technologies and providing its customers with high-productivity tools based upon the best- performing platforms and processes available.

The advanced technology and product scope of the RT-CVD business, however, will most likely offer a better strategic fit and create greater significant value in a different product portfolio. The company is currently in discussions with potential buyers for the business unit.

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