Innovators of Semiconductor Manufacturing Technology Receive 2001 SEMI Award

September 28, 2001 — SAN JOSE, CA — Seven technologists were honored for their contributions to the advancement of semiconductor manufacturing technology at the 28th Annual SEMI Dinner and Award Ceremony sponsored by Semiconductor Equipment and Materials International (SEMI).

Robert Knollenberg, chairman and CEO of Research Electro-Optics, Inc., received the 2001 SEMI Award for North America in recognition of work on development of particle detection and sizing techniques that have enhanced the semiconductor device manufacturer’s ability to build more advanced integrated circuits and improve device manufacturing yield.

Additionally, six individuals were recognized for breakthrough work on laser pattern generation technology, which is used to delineate the micro-miniature circuit patterns seen on flat panel displays and semiconductor devices. The teams are: Anders Thuren, Hans Buhre, and Tor Sandstrom, (Gerhardt Westerberg, Ph.D., deceased, was also a member of the team)– honored for their work at Micronic Laser Systems; and Paul Allen, Neil Berglund and Paul Warkentin — honored for their work at Ateq (now Etec Systems, Inc., an Applied Materials company).

“Today’s incredibly complex semiconductors and flat panel displays would not be possible without Dr. Knollenberg’s contribution to contamination control in the manufacturing process, and the contributions of the Ateq and Micronic Laser Systems teams to development of technology that efficiently delineates micro-miniature circuit elements,” said SEMI president, Stanley T. Myers. “With this award, our industry recognizes these technology pioneers for their brilliant innovation and dedication to the creation of pivotal technology that has significantly advanced our industry.”

Particle detection technology is broadly used to detect and then measure the number and size of debris in water, chemicals and clean room air. Laser Pattern Generation Technology is used to delineate the hundreds of millions of tiny micro-miniature circuit elements that comprise today’s most advanced semiconductor devices and flat panel displays.

The team from Micronic Laser Systems: Anders Thuren, Hans Buhre and Tor Sandstrom, began their work in 1971 and developed the first commercial laser writer sold to the integrated circuit photomask industry in 1976. They went on to develop enabling laser pattern generation technology used today to manufacture flat panel displays. In 1983 the team from ATEQ: Neil Berglund, Paul Allen and Paul Warkentin also pioneered the development of laser pattern generation technology for the integrated circuit photomask industry.

Based in San Jose, Calif., SEMI is an international industry association serving more than 2,400 companies participating in the semiconductor and flat panel display equipment and materials markets.


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