June 11, 2003 — Integrated Sensing Systems Inc. (ISSYS) has launched a new business for its nanomaterial designed to boost the performance of MEMS and other devices.
The Ypsilanti, Mich.-based MEMS developer said NanoGetters, a wholly owned subsidiary, sells the eponymous technology — thin films of chemically reactive materials that pull air or water vapor out of the cavity or package. For MEMS in particular, NanoGetters offers a service for capping wafers with the new material, allowing integration into MEMS vacuum package processes at the full wafer or individual chip level.
The product was developed by ISSYS for its MEMS devices, but the company saw the potential in other applications, such as gas purification, semiconductor devices or solid-state vacuum pumps.
“It’s a performance issue and enhancement to a technique of vacuum packaging,” said Doug Sparks, ISSYS’s executive vice president of operations. “We’ve been using it for over a year on our MEMS devices and gotten good results over time.”