Ushio to acquire half of German chip equipment maker

July 18, 2005 – Ushio Inc. said Friday it will acquire an equity stake of 50% in Xtreme Technologies GmbH of Germany, a developer of lithography devices used to make semiconductor chips, from Lambda Physik AG of Germany, reports Jiji news.

Ushio will invest a total of 1.1 billion yen (US$9.8 million)in Xtreme, including the cost of share purchase and funds for research and development. Xtreme was established in 2001 as a 50-50 joint venture of Lambda and Jenoptic Group, also of Germany, to develop lighting sources for EUV lithography equipment.

Ushio is participating in Japan’s national project to develop EUV-related technologies. The company hopes to use the latest deal to accelerate the development of EUV lighting sources and begin shipments in late 2007.

Ushio aims to boost its sales of the devices to some 50 billion in 2016, in a market estimated to grow to around 100 billion yen.


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