TEL adding Rudolph litho inspection to coater/developer

October 26, 2006 – Tokyo Electron Ltd. has signed a deal to integrate Rudolph Technologies’ lithography inspection technology in its coater/developer tools, with worldwide distribution rights.

The agreement gives TEL “full distribution responsibilities,” to address customers’ requests for total package solutions with sales and support, noted Toshi Nishigaki, TEL’s director of clean track sales and marketing.

“This integrated lithography offering compliments our own direct standalone approach very nicely, providing a complete lithography solution for our customers,” stated Ardy Johnson, Rudolph’s VP of marketing, adding that the long-term deal also addresses “possible next-generation integrated inspection technologies.”

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