TEL adding Rudolph litho inspection to coater/developer

October 26, 2006 – Tokyo Electron Ltd. has signed a deal to integrate Rudolph Technologies’ lithography inspection technology in its coater/developer tools, with worldwide distribution rights.

The agreement gives TEL “full distribution responsibilities,” to address customers’ requests for total package solutions with sales and support, noted Toshi Nishigaki, TEL’s director of clean track sales and marketing.

“This integrated lithography offering compliments our own direct standalone approach very nicely, providing a complete lithography solution for our customers,” stated Ardy Johnson, Rudolph’s VP of marketing, adding that the long-term deal also addresses “possible next-generation integrated inspection technologies.”


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *


KLA-Tencor announces new defect inspection systems
07/12/2018KLA-Tencor Corporation announced two new defect inspection products at SEMICON West this week, addressing two key challenges in tool and process monit...
3D-Micromac unveils laser-based high-volume sample preparation solution for semiconductor failure analysis
07/09/2018microPREP 2.0 provides order of magnitude time and cost savings compared to traditional sample...
Leak check semiconductor process chambers quickly and reliably
02/08/2018INFICON,a manufacturer of leak test equipment, introduced the UL3000 Fab leak detector for semiconductor manufacturing maintenance teams t...