Dec. 4, 2006 — Hollis, N.H.-based J. P. Sercel Associates (JPSA) announced a new integrated Z-theta motorized stage that it says offers high precision operation for wafer processing and positioning.
JPSA says the non-contact operation — as opposed to typical worm and wheel rotary designs — reduces maintenance requirements, is less susceptible to wear, and is not affected by torque variations because there’s no gear interface. The new Z-theta stage provides 360 degrees of rotational capability, and its Z-axis capability makes it applicable to a wide range of applications, with the ability to accommodate wafers of varying thicknesses and diameters.
Advantages of the new rotary stage include continuous or limited travel, excellent accuracy and repeatability, a cog-free motor for smooth motion; zero gear backlash; low wobble and bearing run-out; and no accuracy changes over time due to gear wear.
The stage is intended for laser micromachining applications and wafer processing, among others. Resolution (microns/arc seconds) is 0.25µm in the Z axis, and 0.72 arc seconds in the Theta axis; Repeatability of ±2 µm in the Z axis, and ±1 arc second for Theta.