Reducing parametric test costs with faster, smarter parallel test techniques, The advent of parallel testing capability takes modern parametric test systems out
of the extrapolation that predicts wafer test cost will exceed wafer fabrication cost in three technology nodes. Parallel parametric test has been shown to deliver the same data in substantially less test time in the volume production use case. It was also shown to deliver substantially more data (and learning) in the same test time during process development, with
the discovery of a new Cu/low k process integration effect. By coordinating the development
of test structures for parallel test with scheduled ask changes, parallel parametric test also provides ongoing opportunities for decreasing parametric cost of test in volume production.