S/TEM: Fast, Repeatable, Automated Preparation of Ultra-Thin S/TEM Samples

As microelectronic structures and critical dimensions continue to shrink, semiconductor labs become more and more dependent on scanning/transmission electron microscope (S/TEM) tools. The problem: waiting many hours or days for highly trained personnel to prepare the ultra-thin samples required for S/TEM. Read this paper to learn how the AutoTEMTM G2 software for FEI DualBeamTM systems accelerates preparation time of high-quality, ultra-thin samples to as fast as 20 minutes, and makes the preparation of multiple samples much more reliable and repeatable.



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