ASMI, SAFC eye new ultrahigh-k mats for ALD

Jan. 6, 2008 – ASM International and SAFC’s Hitech division have signed a partnership targeting atomic layer deposition (ALD) source materials for advanced ultrahigh-k (ULK) insulators targeting the 3x manufacturing node.

The partnership centers on new “cyclopentadienyl” chemical source materials seen enabling ALD of next-generation ULK insulators such as strontium and barium — with k>100 dielectric constants vs. the k≤30-40 of today’s zirconium and hafnium-based high-k insulators — expected to be ready for use in production at the 3x node starting around 2011. The new deal incorporates certification for chemical sources, a license for ASMI’s ALD patents, and further development of the chemical sources.

Peter Heys, director of R&D for SAFC Hitech, noted that the company and ASMI have been working together on these cyclopentadienyl source materials “for some time,” producing sources that demonstrate high-quality ULK films via ALD. The firms aim to scale up the materials for high-volume manufacturing of both strontium and barium ILK source precursors “up to and beyond 2011,” consistent with ITRS Roadmap requirements, he said in a statement.

“Partnership agreements such as this will allow us to develop new materials much more efficiently, and to prepare the supply chain for timely introduction of Ultra High-k materials in the manufacturing process,” added Ivo Raaijmakers, ASMI’s CTO and director of R&D.

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

NEW PRODUCTS

KLA-Tencor announces new defect inspection systems
07/12/2018KLA-Tencor Corporation announced two new defect inspection products at SEMICON West this week, addressing two key challenges in tool and process monit...
3D-Micromac unveils laser-based high-volume sample preparation solution for semiconductor failure analysis
07/09/2018microPREP 2.0 provides order of magnitude time and cost savings compared to traditional sample...
Leak check semiconductor process chambers quickly and reliably
02/08/2018INFICON,a manufacturer of leak test equipment, introduced the UL3000 Fab leak detector for semiconductor manufacturing maintenance teams t...