SMU-Per-Pin System Architecture Supports Fast, Cost-Effective Variation Characterization

As the knowledge of high density test structure design has grown quickly in recent years, the ability to implement fast variation characterization techniques is often limited by the number of Source-Measure Units (SMUs) available in conventional parametric testers. Overall throughput on parametric testers can be limited by the SMU resources when parallel test techniques are being implemented. In addition to the limitations imposed by the number of SMUs, the overhead involved in running multiple tests in parallel can also prove to be a bottleneck. This white paper compares different strategies for minimizing these bottlenecks and outlines a new approach that employs an SMU-based test system that provides the high throughput necessary for variation characterization while keeping the cost to semiconductor manufacturing facilities affordable.

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