Heated vacuum-chuck increases control with thin substrate coating, says USI

January 13, 2011 – Business Wire — Ultrasonic Systems, Inc. (USI), high-performance ultrasonic spray coating equipment manufacturer for the solar, semiconductor, and fuel cell markets, released a heated vacuum chuck option for the Prism spray coating system.

Click to EnlargeThe heated vacuum chuck option for Prism suits thin substrate, wafer, foil, and membrane coating applications, where it enhances control of the substrate to achieve the desired coating thickness and uniformity. The heated vacuum chuck can be programmed to heat the substrate up to 150C. Available in two size options for various requirements, the vacuum chuck features a sintered aluminum chuck plate for an even vacuum draw across the entire chuck surface. Vacuum is supplied via an integrated venturi vacuum generator.

The flexible and configurable Prism spray coating system can be used in production and R&D applications within the semiconductor, fuel cell, and electronics assembly markets. All Prism systems leverage USI’s proprietary, nozzle-less ultrasonic spray head technology providing material transfer efficiency up to 99%.

Ultrasonic Systems, Inc. (USI) manufactures high-performance spray coating equipment based on proprietary ultrasonic spray coating technology for solar, semiconductor, fuel cell, medical, and electronics assembly markets. For more information, visit www.ultraspray.com.

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