SEMATECH names lithography director

September 28, 2011 — SEMATECH appointed Dr. Stefan Wurm as the consortium’s director of lithography, responsible for the strategic direction of SEMATECH’s Lithography program, particularly worldwide EUV infrastructure development.

Dr. Wurm, a GLOBALFOUNDRIES assignee, previously served as the associate director of lithography at SEMATECH. He joined SEMATECH’s International 300mm Initiative (I300I) in the 1990s, responsible for 300mm metrology tool equipment demonstrations. He’s also managed the consortium’s extreme ultraviolet (EUV) program. Wurm is a principal member of technical staff at GLOBALFOUNDRIES Technology Development Group and has held positions with Advanced Micro Devices, Siemens Semiconductor Group, Infineon, and Qimonda.

Dr. Wurm holds a doctorate in physics and natural sciences from the Technische Universit

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

NEW PRODUCTS

KLA-Tencor announces new defect inspection systems
07/12/2018KLA-Tencor Corporation announced two new defect inspection products at SEMICON West this week, addressing two key challenges in tool and process monit...
3D-Micromac unveils laser-based high-volume sample preparation solution for semiconductor failure analysis
07/09/2018microPREP 2.0 provides order of magnitude time and cost savings compared to traditional sample...
Leak check semiconductor process chambers quickly and reliably
02/08/2018INFICON,a manufacturer of leak test equipment, introduced the UL3000 Fab leak detector for semiconductor manufacturing maintenance teams t...