Custom SOI wafers debut from IQE for MEMS, related manufacturing

October 11, 2011 – — IQE released a customizable range of silicon on insulator (SOI) products that IQE reports afford improved thickness and doping control.

The SOI wafers can be used in micro electro mechanical systems (MEMS), microprocessors, high-voltage devices, and other microelectronics. SOI can offer better parasitic device capacitance and resistance to latch-up than bulk silicon. Its mechanical properties can improve etch-stop in MEMS manufacturing, particularly for complex designs.

IQE Silicon Ltd is debuting the product range allowing customers to tune the SOI parameters to their own specifications in terms of doping type and device layer thickness. The customized SOI orders can be fabricated as small as 50 wafers for prototyping and niche operations.

IQE supplies advanced epi-wafers, supported by an outsourced foundry services portfolio, to major semiconductor manufacturing companies. Learn more at

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