Air Liquide doubles semiconductor fab precursor production

January 19, 2012 — Air Liquide Electronics completed a series of expansions at its ALOHA manufacturing sites in the United States (California), France (Chalon) and Japan (Tsukuba). The company has doubled its advanced precursor production capacity, and will be able to introduce multiple products with the updated facilities.

Air Liquide is expanding its precursor production for advanced, nanoscale semiconductor manufacturing processes. The precursors increase the electrical and mechanical performance of film materials used in microelectronics fabrication. The ALOHA product line includes all the advanced CVD and ALD precursors for sub-65nm semiconductor device manufacturing.

Fremont, CA’s site supports mass production of the ALOHA precursors. Its production area doubled, with a new laboratory for joint development projects with customers and technology providers workign on advanced deposition materials. Chalon and Tsukuba have expanded with an eye to more capacity for key products.

Capacity is ramping up for:

  • ZyALD for second generation ZrO2 high-k materials for advanced DRAM,
  • silicon precursors for a variety of sub-32nm applications such as patterning and gapfill in memory and high-end logic chips,
  • high-k metal gate (HKMG) precursors now qualified on major OEM platforms,
  • metallization precursors for copper capping or barrier layers as well as DRAM capacitor electrodes,
  • TORUS precursors for ruthenium metallization,
  • low-k precursors and ancillary materials for advanced back-end dielectric stacks,
  • new materials for new devices such as resistive (ReRAM) and phase change (PCRAM) memory.

Air Liquide has also decided to broaden its offering beyond carrier and specialty gases and precursor materials used in the manufacturing process into fluorine cleaning gas solutions. Starting in 2012, flat panel display and silicon thin film photovoltaic manufacturing sites will have access to this environmentally friendly gas. Read: Air Liquide Electronics launch of a new offer

Air Liquide provides gases for industry, health, and the environment. Air Liquide Electronics is the global organization of Air Liquide dedicated to the semiconductor, photovoltaic and flat panel markets. Air Liquide is listed on the Paris Euronext stock exchange (compartment A) and is a member of the CAC 40 and Dow Jones Euro Stoxx 50 indexes. Learn more at

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