Si-Ware platform creates MOEMS on-wafer with lithographic alignment

January 24, 2012 – PRWEB — Si-Ware Systems (SWS) debuted the Silicon integrated Micro Optical System (SiMOST) platform to fab and package single-chip optical systems with validated micro electro mechanical system (MEMS) components. Multiple optical MEMS (MOEMS) structures can be patterned and etched on silicon on insulator (SOI) wafers using deep reactive ion etching (DRIE). The structures are then wafer-level packaged and diced to create a one-chip optical system.

SiMOST eliminates alignment for optics by lithographically aligning optics on-chip. Si-Ware claims this method reduces costs and package size, and improves chip reliability under shock and vibration.

“For the first time an optical designer has the freedom to design very complex systems with as many components as necessary with no impact on cost of assembly and bill of materials,” said Bassam Saadany, Division Manager for MEMS at SWS. “With SiMOST, optical systems can achieve economies of scale that are similar to the micro-electronics industry in terms of size and cost, which opens up a range of applications and market opportunities.”

SWS has created a library of building blocks for its SiMOST platform that designers can use in creating their optical systems. Optical components include flat, cylindrical and spherical collimating mirrors; wide bandwidth beamsplitters; optical filters; and moving corner cube reflectors. MEMS components include long travel range micro-actuators and micro-motors.

SiMOST has been demonstrated, manufacturing a fully monolithic FT-IR spectrometer and a swept laser source.

The SiMOST platform is complemented by SWS’s ASIC solutions division, which provides interfacing and control circuits. These interface and control ASICs handle the MEMS control, current, voltage and capacitive sensing, data conversion via ADC/DAC, and data processing.

SWS is presenting more details on its SiMOST set of solutions at Photonics West 2012 in San Francisco bJanuary 24-26, Moscone Center, North Hall, Booth #4004. SWS will present on SiMOST technology, January 25 at 12:30PM in the North Hall.

Si-Ware Systems (SWS) is an independent fabless semiconductor company providing a wide spectrum of product design and development solutions, custom ASIC development and supply as well as standard products.

SWS leverages its highly talented teams in MEMS design and development as well as Analog/Mixed-Signal and Radio Frequency (RF) Integrated Circuits (ICs) to provide highly innovative solutions and products in different areas ranging from PLL based timing circuits, sensor interfaces, frequency synthesis, data converters, RF front-ends, and MEMS based sensor systems. For more information, please visit

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