Coventor boosts predictive process modeling for advanced device nodes

April 9, 2012 – Marketwire — Coventor, Inc., micro electro mechanical system (MEMS) and semiconductor device fabrication software provider, launched the latest release of its SEMulator3D software, SEMulator3D 2012. It features improved predictive process modeling tools with increased capacity, speed, and automation for leading-edge process technology nodes.

The SEMulator3D 2012 release makes it possible to model devices in finer detail, down to the sub-nanometer level, and work with larger areas on the die. Assignment of boundary conditions for all process steps is now fully automated.

Unlike conventional TCAD simulation software, SEMulator3D models the complete front-end fabrication sequence at once. It can be used accurately on any device type — deployed now for 22nm logic devices, memory, etc — and can model all possible device variations. This allows users to predict process defect modes and reduce the number of scrap wafers.

SEMulator3D software is now being applied to accelerate development of the 14nm and 10nm nodes. SEMulator3D is also used by leading MEMS integrated device manufacturers (IDMs) and MEMS foundries for process development and design verification prior to tape out. Emerging applications for SEMulator3D include design rule development, failure analysis, and metrology.

Also read: Coventor updates CoventorWare 2012 MEMS design software

Coventor Inc. makes automated design tools for micro electro mechanical systems (MEMS) and virtual fabrication of MEMS and semiconductor devices. More information is available at

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