Vacuum pumps improve throughput by 90% with new rotary design

April 10, 2012 — Vacuum and abatement equipment provider Edwards Limited uncrated the STP-iXR1606 series magnetically-levitated turbo-molecular pumps (TMP) with fully integrated onboard controllers. Its new rotary design improves throughput by about 40% at high gas flow rates; nearly 90% percent in maximum gas flow, compared to existing vacuum pump products, the company reports.

The pumps’ fully integrated controller eliminates the connection cable and rack conventionally required for vacuum pumps. This reduces the vacuum system footprint in the fab, and can cut installation time and costs. A small power supply for the on-board controller reduces energy consumption at high gas flows by about 32%.

The STP-iXR1606 matches the peak pumping speed of Edwards’ highest performing pump in the 8” TMP class, with higher throughput and maximum allowable gas flow. The STP-iXR1606 series delivers high reliability in dirty environments with equivalent IP54 protection against dust and humidity. It has I/O remote, RS232C, RS485 and STP-link standard communication ports, with Profibus and DeviceNet available as options. The magnetically-levitated TMPs require no maintenance.

Edwards creates vacuum products for electronics and other manufacturing environments. Learn more at

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