Nanostructured polymer lithography platform established by CEA-Leti and Arkema

May 11, 2012 — Research organization CEA-Leti, chemical company Arkema, and LCPO (Laboratoire de Chimie des Polymères Organiques), all based in France, are demonstrating the resolution potential of lithography based on nanostructured polymers. These initial results meet the requirements of the next 4 generations of electronic chips — ranging from 20nm to sub-10nm. Building on this success, CEA-Leti and Arkema — which first announced their partnership in microelectronics research earlier this month — have created a development platform dedicated to this technology.

As part of their joint laboratory, Arkema and CEA-Leti, with the help of Professor Hadziioannou’s team of LCPO, have successfully patterned a 20nm pitch and reduced the diameter of contacts down to 7nm with nanostructured polymers.

Arkema and CEA-Leti have created IDEAL (Insertion of directed self assembly [DSA] lithography for CMOS application), a collaborative research platform dedicated to the development and industrialization of lithography based on nanostructured polymers. This platform relies on CEA-Leti’s expertise in process and electronic component integration, and on Arkema’s know-how in the development and industrialization of nanostructured polymers. These complementary capabilities will help adapt materials and processes to achieve optimum results for the semiconductor industry.

The self-assembly (or nanostructuring) of polymers is an alternative to conventional optical and the new extreme ultra violet (EUV) lithography technologies. DSA lithography boasts low manufacturing costs and straightforward integration in existing processes for microelectronics manufacturers. Also read: EUV, DSA ready at 11nm

Arkema has developed a block copolymer technology that yields innovative nanostructured materials with a wide range of properties, some of which are particularly suited to self-assembled lithography. CEA-Leti is using its advanced 300mm pilot line for the collaboration.

Leti (Laboratoire d’Électronique de Technologie de l’Information) is an institute of CEA, a French research and technology organization with activities in energy, IT, healthcare, defense and security. Leti is focused on creating value and innovation through technology transfer to its industrial partners. It specializes in micro- and nanotechnologies and their applications, from wireless devices and systems, to biology, healthcare and photonics, as well as in Micro-Nano Systems (MNS). For more information, visit www.leti.fr.

Arkema is a global chemical company. Learn more at http://www.arkema.com/.

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