Edwards tailors vacuum pump for LED, compound semiconductor manufacturing

June 26, 2012 — Vacuum product and abatement system maker Edwards (NASDAQ:EVAC) introduced the iXH645H dry pump, optimized for metal-organic chemical vapor deposition, a key step in light-emitting diode (LED) and compound semiconductor (III-V materials) manufacturing.

The iXH645H delivers very high gas flow capability and can operate continuously at the high loads required for the latest-generation LED manufacturing tools. LED and compound semiconductor manufacturing processes typically use high flows of light hydrogen and highly corrosive ammonia gasses. The iXH645H reportedly offers superior hydrogen pumping performance and a corrosion-resistant design, including a patented nitrogen purge barrier to protect the pump seals. Its high-temperature capabilities help prevent condensation of any phosphorous compounds present.

Maintenance requirements are minimized to increase uptime. Advanced oil lubrication and seal technology eliminate periodic maintenance requirements, while its thermal and motor design prevent overheating, motor overloads or zones of limited operation. The pump’s optimized temperature control system ensures the pump is ready for process within approximately 30 minutes of start-up.

Also read: Growing market for LEDs fuels need for advanced abatement systems

Visit Edwards at North Hall, Booth 5351 during InterSolar and SEMICON West, taking place July 10-12 at the Moscone Center in San Francisco. More SEMICON West products here.

Edwards is a leading manufacturer of sophisticated vacuum products and abatement systems and a leading provider of related value-added services for the manufacture of semiconductors, flat panel displays, LEDs and solar cells, as well as other industries. Edwards’ American Depositary Shares trade on The NASDAQ Global Select Market under the symbol EVAC. Further information about Edwards can be found at www.edwardsvacuum.com.

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