Plasma-Therm presents workshop at China University

Plasma-Therm recently presented an advanced plasma processing workshop at Xidian University in Xi’an, China that was attended by researchers, students and industry representatives and featured a day-long series of presentations about plasma processing.

Workshop participants represented a range of academic disciplines and industrial concerns, with interests spanning fundamental to applied research. Attendees are actively investigating research and development in devices and structures for which plasma processing technology is often a critical step, including MEMS, waveguides, dielectric deposition, nanostructures, and many others.

Dr. Ma Xiaohua, head of the State Key Discipline Laboratory of Wide Band Gap Semiconductor Technology and the workshop host, said, “I always believed that Plasma-Therm’s tools have good performance, and know that the company has deep experience in etching and deposition processes. I really appreciated Dr. Lishan’s presentations. Our professors and students who have studied plasma processing learned more about the technology from Dr. Lishan’s rich experience, and gained insights that will be useful in their research.

“I thought the workshop would be more of a product promotion in the beginning, but now want to say that it was not, and I highly recommend the workshop to researchers, professors, engineers, and students,” Dr. Xiaohua concluded.

Attendees commented that the workshop lectures and multimedia materials provided a thorough introduction to plasma fundamentals, as well as in-depth information about etch and deposition applications used for compound semiconductor devices such as high electron mobility transistors (HEMTs), MEMS devices, and photonic devices such as solid state lasers.

Dr. David Lishan, Principal Scientist and Director, Technical Marketing at Plasma-Therm, has presented in-depth plasma processing workshops at more than 20 institutions in the United States, Sweden, Israel, South Korea, Taiwan, Singapore, and other countries. This was the fourth workshop he has presented at institutions in China in recent months.

Dr. Lishan noted that students and industrial researchers throughout the world are eager for information about fundamental concepts as well as advanced techniques of plasma processing. “It is always interesting to see the enthusiasm for greater understanding of plasma processing across many fields of research.” He said. “Bringing researchers together to share experiences and foster collaboration through the workshop has been very rewarding.”


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