Entegris introduces SmartStack 300 mm contactless horizontal wafer shipper

Entegris, Inc., a producer of yield-enhancing materials and solutions for highly advanced manufacturing environments, has expanded its wafer shipper family of products with the SmartStack (R) 300 mm Contactless Horizontal Wafer Shipper (HWS). The SmartStack 300 mm is the industry’s first contactless horizontal wafer shipper capable of holding a full lot of 25 wafers, almost twice the capacity of competitive wafer shippers. Entegris’ design departs from traditional interleaf inserts and foam cushions by using a perimeter support ring to contain wafers inside. The wafers are positioned so that they move in unison, preventing wafer-to-wafer contact and potential damage from impact.

“We designed an ideal solution for shipping and storing 25-lens bumped or thin wafers that offers improved safety over conventional wafer shippers,” said Entegris Product Marketing Manager, Doug Moser. “By placing the wafers on rings and removing the interleaf inserts and foam cushions, the wafers are protected from stains, imprints and scratches typically caused by these inserts. Additionally, the new design accommodates 25 wafers in one shipper, thereby increasing shipping density and lowering shipping cost 50% or more, compared with a conventional FOSB.”

The SmartStack 300 mm is designed to accommodate wafers of varied thickness (150 µm to 1100 µm), for a variety of applications including 3D, 2.5D, SoC, MEMS, LED and power semiconductors. The new design is also available in the 150 mm and 200 mm size. The automation-compatible features of the 300 mm HWS enable ease-of-use and limit manual intervention.


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