Standards industry leaders honored at SEMICON West 2016

SEMI honored four industry leaders for their outstanding accomplishments in developing Standards for the electronics and related industries. The SEMI Standards awards were announced at the SEMI International Standards reception held during SEMICON West 2016.

The 2016 SEMI International Standards Excellence Award, inspired by Karel Urbanek,is the most prestigious award in the SEMI International Standards Program. Yesterday, it was awarded to Terry Asakawa of Tokyo Electron.   His leadership was critical in establishing the PV Automation Global Technical Committee and its subsequent transformation into the Automation Technology Global Technical Committee, as he envisioned how the SEMI Standards Program could effectively address simpler, flow-oriented manufacturing in industries outside of semiconductor manufacturing. In addition, he led the identification of previously unknown incompatibility issues and lack of evaluation methods for interoperability and closed the gap with two important documents on FOUP-Load Port Interoperability Implementation. In recent years, Asakawa has been very active in development work to enhance the GEM300 Standards with contemporary concepts (e.g., scheme for secure recipe management and use of prediction in real time carrier logistics controls). He continues to make major contributions to increasing the usability and relevance of SEMI equipment communication Standards, which are essential to Smart Manufacturing.

In addition to the 2016 SEMI International Standards Excellence Award, the recipients of three other major SEMI Standards awards were also announced:

The Merit Award

The Merit Award recognizes major contributions to the SEMI International Standards Program.  Award winners typically take on a very complex problem at the task-force level, gain industry support, and drive the project to completion. This year, the award was presented to Kurt Haller of KLA-Tencor. Haller has been a key member of the Silicon Wafer technical committee for years, and is currently the North American leader for the International Automated Advance Surface Inspection Task Force. His diplomatic leadership strengthened collaboration within the international community, enabling the task force to efficiently revise and maintain wafer inspection standards to current technology including SEMI M35 – Guide for Developing Specifications for Silicon Wafer Surface Features Detected by Automated Inspection, M50 – Test Method for Determining Capture Rate and False Count Rate for Surface Scanning Inspection Systems by the Overlay Method, M52 – Guide for Specifying Scanning Surface Inspection Systems for Silicon Wafers for the 130nm to 11nm Technology Generations, M58 – Test Method for Evaluating DMA Based Particle Deposition Systems and Processes, MF1048 – Test Method for Measuring the Reflective Total Integrated Scatter, and MF1811 – Guide for Estimating the Power Spectral Density Function and Related Finish Parameters from Surface Profile Data within the past three years.

The Leadership Award 

The Leadership Award recognizes outstanding leadership in guiding the SEMI International Standards Program. Sean Larsen of Lam Research has been the leader of the North America EHS Technical Committee (TC) Chapter and task forces for over a decade. He is the co-leader of SEMI S22 (Electrical Design) Revision Task Force, SEMI S2 Non-Ionizing Radiation Task Force, and Control of Hazardous Energy Task Force. Larsen is very engaged in global EHS Committee activities, as well as the North American Regional Standards Committee and, previously, the International Standards Committee. In both the North America (NA) EHS Technical Committee and the NA Regional Standards Committee, he has established forums for discussing Standards rules, questions, and problems, as well as developed processes for suggesting changes to the Regulations when determined to be appropriate. Larsen’s deep knowledge of the Standards Program provides guidance and support to the challenging EHS Committee.

The Legacy Award 

Win Baylies of BayTech-Resor was recognized with the SEMI Standards Legacy Award for his valuable contributions and continued dedication to the SEMI International Standards Program, which is celebrating its 43rd anniversary this year. Since the 1970s, Baylies has been involved with numerous committees including Flat Panel Display, Photovoltaic, Silicon Wafer, Traceability, Compound, High-Brightness LED, 3-Dimensional Stacked Integrated Circuits, and MEMS. Baylies has tirelessly promoted Standards development internationally, recruited key volunteers throughout the supply chain and conducted countless education programs. His long-standing dedication to the advancement of SEMI Standards has been instrumental for SEMI.

For more information about SEMI International Standards, visit


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