Enabling EUV and the patterning roadmap


Date: Tuesday, June 5, 2018 at 1:00 p.m. ET

Free to attend

Length: Approximately one hour

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EUV lithography has steadily been gaining momentum in recent years and edges closer and closer to insertion in manufacturing.  While considerable progress has been made and the first uses of EUV appear imminent, there remain some difficulties that will challenge the rate and degree to which EUV can be employed.  This talk will aim to explore the patterning-related challenges that remain, summarize some of the ongoing efforts to tackle these challenges, and give an outlook towards the future.

What You’ll Learn:

  • Understand how EUV lithography has steadily been gaining momentum in recent years and edges closer and closer to insertion in manufacturing.
  • Hear about the difficulties that remain and how they will challenge the rate and degree to which EUV can be employed.
  • Find out what’s being done to tackle these challenges, and what the outlook is towards the future.

Speaker: Greg McIntyre, Director of Advanced Patterning, imec

Greg McIntyre is Director of Advanced Patterning at imec and responsible for areas related to advanced lithography equipment and process development, metrology and patterning process control, computational lithography, and exploratory patterning materials. Prior to joining imec, he was the technical lead for various areas of advanced lithography, imaging and modeling within the IBM research alliance in Albany, New York. He has published over 80 papers, won 7 best paper awards, and has launched a successful startup in the field. Prior to becoming a lithographer, Greg served as a Captain in the US Army. He holds a Ph.D. and M.S. in electrical engineering from the University of California, Berkeley, and a B.S. from the United States Military Academy at West Point.

Sponsored by LouwersHanique

Featured Products: 3D components in glass and fused silica using “Selective Laser-induced Etching” (SLE) Technologies and Modular Ultra-High Vacuum electrical and optical feedthroughs

LouwersHanique has been a leading specialist in the manufacturing of technical glass and ceramic components as well as assembly technologies for a wide variety of high-tech industries for over 60 years. We are specialized in thermal forming of glass and in the mechanical and laser processing of technical glass and technical ceramics. Our state of the art equipment and clean room facilities allow the precision manufacturing of parts and assemblies with tolerances into the (sub) micron region.


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