Edwards to expand semiconductor offering with the planned addition of Brooks Automation’s cryogenic business

Atlas Copco Group has announced its agreement to acquire the cryogenic business of Brooks Automation, Inc through its wholly owned US entity Edwards Vacuum LLC. Once the deal is complete, which is expected to be in the first quarter of 2019, it will significantly expand Edwards’ offering to the global semiconductor industry.

Brooks Automation, headquartered in Chelmsford, USA is a market leader in the provision of advanced cryopumps and associated products for the semiconductor industry through its CTI-Cryogenics and Polycold brands.

The acquisition includes cryopump operations in Chelmsford, MA and Monterrey, Mexico as well as a worldwide network of sales and service centres. Brooks Automation’s 50% shareholding in Japan-based joint venture company Ulvac Cryogenics Inc is also part of the deal.

The acquired business will become part of the Semiconductor and Semiconductor Service divisions within Atlas Copco’s Vacuum Technique business area and will significantly expand Edwards’ chamber solutions offering to customers in the semiconductor industry.

Paul Rawlings, President of the Semiconductor division, said: “The acquisition of Brooks Automation’s cryogenic business will help us cement our position as a trusted partner to the world’s leading semiconductor OEMs by enabling the expansion of our current chamber solutions offering through the addition of new technologies and products.”  The planned acquisition is subject to regulatory approvals.

Further information about Edwards can be found at www.edwardsvacuum.com

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