Veeco ion beam deposition tool matches PVD speed

April 16, 2012 — Veeco Instruments Inc. (Nasdaq:VECO) debuted the SPECTOR-HT ion beam deposition (IBD) tool for thin-film deposition in optical products, such as lasers, telecommunications chips, and more. It reportedly creates high-quality films in a cost-effective manufacturing process compared to physical vapor deposition (PVD), evaporative coatings, and ion-assisted deposition.

Veeco claims up to 400% higher throughput, 300% better target utilization and 50% higher material uniformity with SPECTOR-HT, over previous SPECTOR generations. The SPECTOR-HT is fully automated, achieving accelerated deposition rates at speeds comparable to PVD. It delivers an increased deposition rate on lot sizes up to twice as large as those in previous SPECTOR generations.

The SPECTOR-HT is debuting at the SPIE Photonics Europe Trade Show in Brussels, Belgium, booth #G323.

Veeco makes equipment to develop and manufacture optoelectronics, light-emitting diodes (LEDs), solar cells, hard disk drives (HDDs) and other devices. Visit

Visit the LED Manufacturing Channel on Solid State Technology and subscribe to the LED Manufacturing News monthly e-newsletter!


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

Leave a Reply

Your email address will not be published. Required fields are marked *

You may use these HTML tags and attributes: <a href="" title=""> <abbr title=""> <acronym title=""> <b> <blockquote cite=""> <cite> <code> <del datetime=""> <em> <i> <q cite=""> <s> <strike> <strong>


Radiant Vision Systems announces new automated visual inspection system
11/06/2017Radiant Vision Systems, a provider of high-resolution imaging solutions for automated visual analysis of devices and surfaces, an...
SEMI-GAS Xturion Blixer enables on-site blending of forming gas mixtures
10/03/2017The Blixer provides a cost-effective alternative to purchasing expensive pre-mixed gas cylinders by enabling operators to blend ...
Automated thickness measurement system speeds production
09/20/2017ACU-THIK is an automated thickness measurement tool incorporating dual contact probes for high accuracy inspection of semiconductor wafers....