Advantest manufactures piezoelectric MEMS for semiconductor testing

March 19, 2012 - BUSINESS WIRE — Advantest Corporation (TSE:6857, NYSE:ATE) began producing micro electro mechanical system (MEMS) relays, shipping samples in April 2012. The MEMS relays will be used in semiconductor testing equipment, high-speed communications devices, high-frequency wave measurement equipment and their components.

Mass production will begin in January 2013.

Advantest manufactures the MEMS with its proprietary deposition technology, creating 1µm-thick piezoelectric film. This enables a smaller form factor and lower actuation voltage (12V) compared to high-frequency wave relays using electromagnetic or electrostatic actuation. The MEMS device is available in 5.4 x 4.2 x 0.9mm or 2.9 x 3.4 x 0.9mm form factors.

The MEMS are not easily affected by ambient static electricity, like electrostatic relays. The relay also has high reliability, using contact-point control technology honed in Advantest’s semiconductor testing equipment. Using Advantest’s high-frequency measurement technology, the relay can handle up to 20GHz high-frequency transmission, with 50Ω characteristic impedance.

Advantest now plans to introduce products outside the semiconductor testing area, in fields such as automotive and pharmaceutical/medical care.

Advantest provides automatic test equipment (ATE) for the semiconductor industry and measuring instruments used in the design and production of electronic instruments and systems. More information is available at

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