The dry pumps A 100 L with their compact dimensions were specially developed for flexible integration in semiconductor production facilities. These dry multi-stage Roots pumps are ideal for clean applications such as load-lock chambers and transfer chambers as well as for all other noncorrosive applications.
Despite their compact dimensions these pumps provide high pumping speeds and short pump down times. Today, the A 100 L pumps are installed worldwide in all leading semiconductor fabs. These pumps are suitable for operation in cleanrooms.
The further development, the A 100 L ES, cuts energy consumption by up to 50% (ES = Energy Saving). Its pumping speed is significantly higher in the low pressure range. Additional benefits include a lower final pressure and reduced noise level.
The innovative and fully integrated ES module reduces energy use to a minimum in the low pressure range. This significantly reduces operating costs. To illustrate the point: annual savings per pump total up to 7,900 kWh. This corresponds to 3.9 tons of CO2.
At a typical 300 mm semiconductor fab level equipped with 1,300 load-lock pumps, the energy saving adds up to 10 GWh, or about 360 k€ or 5,100 tons of CO2 per year.
In addition to energy savings, the final pressure of the A 100 L ES is reduced to 7×10-4 mbar (hPa). This opens up new potential applications requiring an enhanced pumping capacity combined with low pressure. The noise level is also reduced from 58 dB (A) to 55 dB (A). The A 100 L ES rounds off the energy-saving product family of medium duty process pumps in the A3P series and the harsh duty process pumps in the A3H series.