Entegris launches Dispense System optimized for 3D and MEMS applications

Entegris, Inc. announced the latest addition to its IntelliGen family of two-stage dispense technologies used in microelectronics manufacturing processes. The IntelliGen MV extends upon the proven performance of the IntelliGen Mini and HV dispense systems with a solution optimized for 3D and MEMS applications, enabling high-purity filtration and repeatable dispense of mid-viscosity fluids.

“With the growth of 3D IC technology and MEMS, manufacturers are requiring a higher level of throughput and greater filtration capabilities to meet their unique process demands,” said Entegris Chief Operating Officer, Todd Edlund.  “Each application requires an intensive focus on real-time, interactive diagnostics and feedback. The IntelliGen MV provides several new diagnostic and detection features to reduce defects, simplify recipe programming and improve filter priming.”

The IntelliGen MV Dispense System’s compact design allows manufactures to install multiple dispense systems into a single track with the ability to process several chemistries simultaneously and maximize filter performance even in the most sensitive photochemicals between 100 and 300 centipoise.

The IntelliGen MV Dispense System and other Entegris contamination control and substrate handling solutions will be featured at the SEMICON® Korea 2015 tradeshow, which is being held at COEX exhibition center in Seoul, Korea from February 4 through 6, 2015.

entegris

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