Ultra fast diaphragm valve for ALD applications

HAM-LET, a global manufacturer of instrumentation valves and fittings for industrial and high purity fluid and gas delivery systems is showcasing its Ultra Fast (UF series) Diaphragm Valve for Atomic Layer Deposition at Semicon Korea in Seoul, during 4-6 February, booth no.2878.

“Our UF series unique flow adjustment mechanism, patent pending no. US 61/910,79, allows for precise flow adjustment and stable flow capacity during rapid high cycle operation,” said Mr. Felix Shestatski, Vice President of Quality, Engineering and R&D at HAM-LET.

The optional extended bonnet and cooling fin provide a superb solution when precise and repeatable performance in high-temperature applications is required. The UF series offers superior sealing performance and remarkable durability in hazardous environments, under severe demands of ultra fast actuation at ultra high purity (UHP) applications.

“Another advantage of our UF diaphragm valve is its outstanding durability and low maintenance, as it offers over 100 million life cycles.

The UF series meets the demand for high-precision diaphragm valves that can perform  repeatable and reproducible performance over an extremely frequent and large number of cycles, required by ALD applications. In addition, the UF series offers a wide range of applicable accessories, such as: position indicators, direct mounted solenoid valves (for actuation speed optimization), integrated thermocouples, heaters and more” said Shestatski.

HAM-LET has received purchase orders of UF series by one of the strongest equipment manufacturer for SamsungIn addition, HAM-LET developed a special high temperature fully immersed version of UF valve for 120°C, enabling position indication and with special inductive sensor designator. The UF series is available in surface mount (IGS) and in-line type of connections, 2-way and multiport configurations.

HAM-LET will showcase a live demonstration of the UF series at Semicon Korea 2015, booth no. 2878, as well as exhibit its advanced actuated ball valves, Let-Lok fittings, process valves and HTC fittings, which are available in Korea through HAM-LET’s distributer, PFK.

UF Diaphragm Valve for for ALD Applications

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