DCG Systems extends circuit edit capability to the 10nm node with the introduction of OptiFIB Taipan

DCG Systems today announces the release of the OptiFIB Taipan circuit edit solution for the most advanced integrated circuit (IC) nodes. The first OptiFIB Taipan system surpassed all benchmark specifications for 10nm edit capabilities at a leading microprocessor manufacturer, resulting in an additional order from the same customer. Orders have also been received from leading fabless and foundry customers looking to support their advanced node development efforts.

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OptiFIB Taipan System

Circuit edit technology is primarily used by product engineers for design corrections during the IC manufacturing process. By using circuit edit instead of producing a new mask every time corrections are needed, organizations can reduce their product time-to-market cycle by four to six weeks each time a new mask production is avoided. In addition, circuit edit solutions help to resolve reliability issues and accelerate yield ramp.

The OptiFIB Taipan system has been completely re-engineered to provide exceptional accuracy and control during the circuit edit process. The system has a new chamber and stage to enhance beam placement accuracy and superior drift control. In addition, the OptiFIB Taipan column retains DCG’s unique, patented coaxial design to enable simultaneous capture of focused ion beam (FIB) and optical images. The column is equipped with piezo motors for control of apertures and gun to drive higher resolution and productivity.

The fully redesigned gas injection system, the Scorpion Plus, offers exceptionally pure and highly controlled chemical dosing.

“DCG Systems’s introduction of the OptiFIB Taipan continues our leadership in providing circuit edit solutions for the industry’s most advanced IC nodes,” said Ketan Shah, circuit edit business unit manager. “The new system offers the best circuit edit selectivity as well as the highest imaging and milling resolution of any circuit edit tool currently available on the market.”

Backside circuit modification on a FinFET device performed by OptiFIB Taipan

Backside circuit modification on a FinFET device performed by OptiFIB Taipan

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