Nanophoton introduces RAMANdrive - a new Wafer Analyzer - for a wide range of applications at semiconductor market at ICCGE-18 (the 18th International Conference on Crystal Growth and Epitaxy) in Nagoya, Japan, August 7th - 12th, 2016.
With sub-micron resolution, RAMANdrive provides stress-, polytype-, defect distribution etc. in 3 dimen- sions using the most powerful Raman Imaging Technology of Nanophoton. The dedicated 300 mm stage was developed for accurate and safe analysis of the whole wafer, while the Raman Imaging Sys- tem provides you with high performance data. Especially the unique Nanophoton Stage Navigation System features easy and fast operation by implementing your data from the regular inspection system and use it to move the wafer to all positions you are interested in for a detailed analysis.
Michael Verst - President/CEO of Nanophoton - commented: “Raman Imaging is one of the most exit- ing technologies for wafer analysis. It provides comprehensive data about stress, polytype, impurity or contamination non-destructively in all 3 dimensions. In combination with our dedicated 300 mm wafer stage, I strongly believe that our RAMANdrive will be a powerful tool especially for QA/QC as well as development work. It will substantially improve the yield ratio, but also accelerate the development of new materials etc. Nanophoton invested a substantial amount of efforts in the development and dur- ing all the time we worked closely with related experts to meet the requirements of our customers in the semiconductor industry.”